hexamethyldisilazane 999-97-3 MSDS
Name: 1 1 1 3 3 3-Hexamethyldisilazane 98% Material Safety Data Sheet
Synonym: Bis(trimethylsilyl)amine; HMDS; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine
CAS: 999-97-3
Section 1 - Chemical Product   MSDS Name:1 1 1 3 3 3-Hexamethyldisilazane 98% Material Safety Data Sheet
Synonym:Bis(trimethylsilyl)amine; HMDS; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine

Section 2 - COMPOSITION, INFORMATION ON INGREDIENTS
CAS# Chemical Name content EINECS#
999-97-3 1,1,1,3,3,3-HEXAMETHYLDISILAZANE 98% 213-668-5
Hazard Symbols: F C
Risk Phrases: 11 18 36/37/38

Section 3 - HAZARDS IDENTIFICATION
  EMERGENCY OVERVIEW
Highly flammable. In use, may form flammable/explosive vapour-air mixture. Irritating to eyes, respiratory system and skin.Moisture sensitive.Corrosive.
Potential Health Effects
Eye:
Causes eye burns.
Skin:
Harmful if absorbed through the skin. Causes skin burns.
Ingestion:
May cause severe gastrointestinal tract irritation with nausea, vomiting and possible burns. May be harmful if swallowed.
Inhalation:
May cause irritation of the respiratory tract with burning pain in the nose and throat, coughing, wheezing, shortness of breath and pulmonary edema. Inhalation may be fatal as a result of spasm, inflammation, edema of the larynx and bronchi, chemical pneumonitis and pulmonary edema.
Chronic:
No information found.

Section 4 - FIRST AID MEASURES
  Eyes: Immediately flush eyes with plenty of water for at least 15 minutes, occasionally lifting the upper and lower eyelids. Get medical aid immediately.
Skin:
Get medical aid. Immediately flush skin with plenty of water for at least 15 minutes while removing contaminated clothing and shoes.
Wash clothing before reuse.
Ingestion:
Do not induce vomiting. If victim is conscious and alert, give 2-4 cupfuls of milk or water. Never give anything by mouth to an unconscious person. Get medical aid immediately.
Inhalation:
Get medical aid immediately. Remove from exposure and move to fresh air immediately. If not breathing, give artificial respiration. If breathing is difficult, give oxygen.
Notes to Physician:
Treat symptomatically and supportively.

Section 5 - FIRE FIGHTING MEASURES
  General Information:
As in any fire, wear a self-contained breathing apparatus in pressure-demand, MSHA/NIOSH (approved or equivalent), and full protective gear. Vapors can travel to a source of ignition and flash back. Flammable liquid and vapor.
Extinguishing Media:
Do NOT use water directly on fire. Use foam, dry chemical, or carbon dioxide.

Section 6 - ACCIDENTAL RELEASE MEASURES
  General Information: Use proper personal protective equipment as indicated in Section 8.
Spills/Leaks:
Absorb spill with inert material (e.g. vermiculite, sand or earth), then place in suitable container. Clean up spills immediately, observing precautions in the Protective Equipment section. Scoop up with a nonsparking tool, then place into a suitable container for disposal. Remove all sources of ignition.

Section 7 - HANDLING and STORAGE
  Handling:
Wash thoroughly after handling. Remove contaminated clothing and wash before reuse. Use only in a well-ventilated area. Use spark-proof tools and explosion proof equipment. Avoid breathing dust, vapor, mist, or gas. Do not get in eyes, on skin, or on clothing. Empty containers retain product residue, (liquid and/or vapor), and can be dangerous. Take precautionary measures against static discharges. Keep away from heat, sparks and flame. Do not ingest or inhale. Use only in a chemical fume hood. Do not pressurize, cut, weld, braze, solder, drill, grind, or expose empty containers to heat, sparks or open flames.
Storage:
Keep away from heat, sparks, and flame. Keep away from sources of ignition. Store in a cool, dry place. Keep container closed when not in use. Store in a tightly closed container. Flammables-area.

Section 8 - EXPOSURE CONTROLS, PERSONAL PROTECTION
  Engineering Controls:
Use process enclosure, local exhaust ventilation, or other engineering controls to control airborne levels below recommended exposure limits.
Exposure Limits CAS# 999-97-3: Russia: 2 mg/m3 TWA Personal Protective Equipment Eyes: Wear appropriate protective eyeglasses or chemical safety goggles as described by OSHA's eye and face protection regulations in 29 CFR 1910.133 or European Standard EN166.
Skin:
Wear appropriate protective gloves to prevent skin exposure.
Clothing:
Wear appropriate protective clothing to prevent skin exposure.
Respirators:
Follow the OSHA respirator regulations found in 29 CFR 1910.134 or European Standard EN 149. Use a NIOSH/MSHA or European Standard EN 149 approved respirator if exposure limits are exceeded or if irritation or other symptoms are experienced.

Section 9 - PHYSICAL AND CHEMICAL PROPERTIES
 
Physical State: Liquid
Color: clear, colorless
Odor: None reported.
pH: Not available.
Vapor Pressure: 20 mm Hg @ 20 C
Viscosity: Not available.
Boiling Point: 125 deg C
Freezing/Melting Point: Not available.
Autoignition Temperature: 379 deg C ( 714.20 deg F)
Flash Point: 8 deg C ( 46.40 deg F)
Explosion Limits, lower: 0.8
Explosion Limits, upper: 16.3
Decomposition Temperature: Not available.
Solubility in water: Insoluble in water.
Specific Gravity/Density: 0.77
Molecular Formula: C6H19NSi2
Molecular Weight: 161.3107

Section 10 - STABILITY AND REACTIVITY
  Chemical Stability:
Stable under normal temperatures and pressures.
Conditions to Avoid:
Mechanical shock, incompatible materials, ignition sources, temperatures above 150C, exposure to moist air or water.
Incompatibilities with Other Materials:
Strong oxidants and strong acids. May decompose upon exposure to moist air or water. When heated to temperatures above 150 C in the presence of air, hexamethyldisilazane can form formaldehyde vapors.
Hazardous Decomposition Products:
Nitrogen oxides, carbon monoxide, carbon dioxide, silicon dioxide, formaldehyde.
Hazardous Polymerization: Has not been reported.

Section 11 - TOXICOLOGICAL INFORMATION
  RTECS#:
CAS# 999-97-3: JM9230000 LD50/LC50:
CAS# 999-97-3: Dermal, guinea pig: LD50 = 1 mL/kg; Draize test, rabbit, skin: 500 uL Severe; Inhalation, mouse: LC50 = 12 gm/m3/2H; Inhalation, rat: LC50 = 8700 mg/m3/4H; Oral, mouse: LD50 = 850 mg/kg; Oral, rabbit: LD50 = 1100 mg/kg; Oral, rat: LD50 = 850 mg/kg; Skin, rabbit: LD50 = 710 uL/kg.
Carcinogenicity:
1,1,1,3,3,3-HEXAMETHYLDISILAZANE - Not listed by ACGIH, IARC, or NTP.
Other:
See actual entry in RTECS for complete information.

Section 12 - ECOLOGICAL INFORMATION
 

Section 13 - DISPOSAL CONSIDERATIONS
  Dispose of in a manner consistent with federal, state, and local regulations.

Section 14 - TRANSPORT INFORMATION
 
IATA
Shipping Name: FLAMMABLE LIQUID, N.O.S.*
Hazard Class: 3
UN Number: 1993
Packing Group: II
IMO
Shipping Name: FLAMMABLE LIQUID, N.O.S.
Hazard Class: 3.2
UN Number: 1993
Packing Group: II
RID/ADR
Shipping Name: FLAMMABLE LIQUID, N.O.S.
Hazard Class: 3
UN Number: 1993
Packing group: II

Section 15 - REGULATORY INFORMATION
 
European/International Regulations
European Labeling in Accordance with EC Directives
Hazard Symbols: F C
Risk Phrases:
R 11 Highly flammable.
R 18 In use, may form flammable/explosive vapour-air
mixture.
R 36/37/38 Irritating to eyes, respiratory system
and skin.
Safety Phrases:
S 7/8 Keep container tightly closed and dry.
S 9 Keep container in a well-ventilated place.
S 16 Keep away from sources of ignition - No
smoking.
S 26 In case of contact with eyes, rinse immediately
with plenty of water and seek medical advice.
S 29 Do not empty into drains.
S 36/39 Wear suitable protective clothing and
eye/face protection.
S 37/39 Wear suitable gloves and eye/face
protection.
WGK (Water Danger/Protection)
CAS# 999-97-3: 1
Canada
CAS# 999-97-3 is listed on Canada's DSL List.
CAS# 999-97-3 is not listed on Canada's Ingredient Disclosure List.
US FEDERAL
TSCA
CAS# 999-97-3 is listed on the TSCA inventory.


SECTION 16 - ADDITIONAL INFORMATION
N/A

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